Design and Analysis of Discrete FET Monitors in 7nm FinFET Product for Robust Technology Validation
- Resource Type
- Conference
- Authors
- Vidya, V.; Zamdmer, N.; Mechler, T.; Onishi, K.; Chidambarrao, D.; Jeong, B. W.; Ko, Y. G.; Lee, C. H.; Sim, J.; Angyal, M.; Crabbe, E.
- Source
- 2023 35th International Conference on Microelectronic Test Structure (ICMTS) Microelectronic Test Structure (ICMTS), 2023 35th International Conference on. :1-3 Mar, 2023
- Subject
- Components, Circuits, Devices and Systems
Photonics and Electrooptics
Semiconductor device modeling
Correlation
Layout
Logic gates
Solids
Foundries
Microelectronics
Bulk FinFET
Fabless
IBM Product
- Language
- ISSN
- 2158-1029
This paper presents two phenomena captured by product-like analog layout design of experiments (DOEs) that are otherwise difficult to capture in foundry baseline test structures. Such product driven test structures are critical for early detection of yield detractors and robustly validating a technology in a fabless design environment.