Characterization of SU-8 Material Based on Substrate Integrated Waveguide Cavities
- Resource Type
- Conference
- Authors
- Zhong, Xiang-Lin; Xu, Zong-Rui; Xu, Zhong-Lin; Wu, Lin-Sheng; Mao, Jun-Fa
- Source
- 2022 International Conference on Microwave and Millimeter Wave Technology (ICMMT) Microwave and Millimeter Wave Technology (ICMMT), 2022 International Conference on. :01-03 Aug, 2022
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Signal Processing and Analysis
Antenna measurements
Radio frequency
Three-dimensional displays
Permittivity measurement
Dielectric loss measurement
Loss measurement
Dielectrics
dielectric characterization
substrate integrated waveguide (SIW)
SU-8
- Language
The dielectric parameters of the SU-8 3050 material are characterized with substrate integrated waveguide (SIW) cavities. The developed fabrication process is presented for the SIW structures on the 80 µm thick SU-8 layer. The SIW cavities with different sizes are designed and fabricated. The relative permittivity and loss tangent of SU-8 are extracted to be 3.14 and 0.05 in Ka band, respectively, which is validated by the good agreement between the simulated and measured results.