Emerging MoS2 Wafer-Scale Technique for Integrated Circuits
- Resource Type
- article
- Source
- Nano-Micro Letters, Vol 15, Iss 1, Pp 1-42 (2023)
- Subject
Wafer-scale growth Molybdenum disulfide Gas deposition Integrated circuits Technology - Language
- English
- ISSN
- 2311-6706
2150-5551