SiNx介质薄膜制备及其对GaN表面金刚石形核生长的影响 / Preparation of SiNx Dielectric Film and Its Effect on Diamond Nucleation Growth on GaN Surface
- Resource Type
- Academic Journal
- Source
- 真空与低温 / Vacuum and Cryogenics. 29(1):12-19
- Subject
磁控溅射 低温等离子体化学气相沉积 氮化硅 介质钝化薄膜 金刚石形核 - Language
- Chinese
- ISSN
- 1006-7086