基于PSD的超精密小型机床几何误差测量系统 / Geometric error measurement system of ultra precision small machine tool based on PSD
- Resource Type
- Academic Journal
- Source
- 机械设计与制造工程 / MACHINE DESIGN AND MANUFACTURING ENGINEERING. 51(9):70-75
- Subject
精密机床 几何误差 PSD 误差测量 - Language
- Chinese
- ISSN
- 2095-509X