硼掺杂对微波等离子体化学气相沉积制备金刚石薄膜高择优取向生长的影响 / Effect of Boron Concentration on the Preferred Orientation of Diamond Films Deposited Using Microwave Plasma Enhanced Chemical Vapor Deposition
- Resource Type
- Academic Journal
- Source
- 集成技术 / Journal of Integration Technology. 6(4):61-69
- Subject
择优取向 微观形貌 硼掺杂金刚石 二次形核 - Language
- Chinese
- ISSN
- 2095-3135