面向化学气相沉积生长单晶金刚石的高导热嵌入型基片托盘设计及其高质量生长工艺研究 / Study on the Synthesis of High Quality Single Crystal Diamond by Chemical Vapor Deposition Using the Embeded Type of Substrate Holder with Highly Thermal Conductivity
- Resource Type
- Academic Journal
- Source
- 集成技术 / Journal of Integration Technology. 6(4):38-48
- Subject
单晶金刚石 同质外延生长 微波等离子体化学气相沉积 基片托盘设计 高功率密度 - Language
- Chinese
- ISSN
- 2095-3135