Ti和TiN薄膜的制备以及残余应力的测试方法研究 / Preparation of Ti and TiN Films and Investigation of the Residual Stress Measuring Method
- Resource Type
- Academic Journal
- Source
- 集成技术 / Journal of Integration Technology. 6(4):20-28
- Subject
薄膜 残余应力 光杠杆法 正测法 背测法 - Language
- Chinese
- ISSN
- 2095-3135