衬底温度对单晶金刚石同质外延生长的影响规律研究 / The Effects of Substrate Temperature on Homoepitaxial Growth of Single Crystal Diamond
- Resource Type
- Academic Journal
- Source
- 集成技术 / Journal of Integration Technology. 6(4):2-9
- Subject
同质外延生长 衬底温度 单晶金刚石 - Language
- Chinese
- ISSN
- 2095-3135