直拉法单晶硅制备过程控氧技术研究进展 / Research Progress on Oxygen Control Technology During Preparation of Czochralski Single-Crystal Silicon
- Resource Type
- Academic Journal
- Source
- 硅酸盐通报 / Bulletin of the Chinese Ceramic Society. 41(9):3259-3278
- Subject
直拉法 单晶硅 控氧技术 热场结构 工艺参数 连续直拉法 - Language
- Chinese
- ISSN
- 1001-1625