Phonons traveling in solid-state devices are emerging as a universal excitation that can couple to different physical systems through mechanical interaction. At microwave frequencies and in solid-state materials, phonons have a similar wavelength to optical photons, enabling them to interact efficiently with light and produce strong optomechanical effects that are highly desirable for classical and quantum signal transduction between optical and microwave. It becomes conceivable to build optomechanical integrated circuits (OMIC) that guide both photons and phonons and interconnect discrete photonic and phononic devices. Here, we demonstrate an OMIC including an optomechanical ring resonator (OMR), in which infrared photons and GHz phonons co-resonate to induce significantly enhanced interconversion. The OMIC is built on a hybrid platform where wide bandgap semiconductor gallium phosphide (GaP) is used as the waveguiding material and piezoelectric zinc oxide (ZnO) is used for phonon generation. The OMR features photonic and phononic quality factors of $>1\times10^5$ and $3.2\times10^3$, respectively, and resonantly enhances the optomechanical conversion between photonic modes to achieve an internal conversion efficiency $\eta_i=(2.1\pm0.1)%$ and a total device efficiency $\eta_{tot}=0.57\times10^{-6}$ at a low acoustic pump power of 1.6 mW. The efficient conversion in OMICs enables microwave-optical transduction for many applications in quantum information processing and microwave photonics.
Comment: 11 pages, 4 figures