Machine-learning micropattern manufacturing
- Resource Type
- Article
- Authors
- Wang, Si; Shen, Ziao; Shen, Zhenyu; Dong, Yuanjun; Li, Yanran; Cao, Yuxin; Zhang, Yanmei; Guo, Shengshi; Shuai, Jianwei; Yang, Yun; Lin, Changjian; Chen, Xun; Zhang, Xingcai; Huang, Qiaoling
- Source
- In Nano Today June 2021 38
- Subject
- Language
- ISSN
- 1748-0132