Effect of surface contamination on XANES analysis of DLC films
- Resource Type
- ACADEMIC JOURNAL
- Lomon, Jidapa a, b; Saisopa, Thanit a, b; Poolcharuansin, Phitsanu c; Pasaja, Nitisak c; Chingsungnoen, Artit c; Supruangnet, Ratchadaporn d; Nakajima, Hideki d; Chanlek, Narong d; Songsiriritthigul, Prayoon a, b, ∗
- In Radiation Physics and Chemistry June 2020 171
The effect of adventitious contamination on total-electron-yield XANES analysis of carbon species of diamond-like carbon (DLC) films was investigated. XPS and XANES measurements on a DLC sample with different amounts of contamination were carried out in the same analysis chamber. The amount of contamination was adjusted by 0.5-keV Ar-ion sputtering. The sp2-bonded atoms deduced from the XANES spectra was found to vary with amount of the surface contamination. Bombardment DLC films with 0.5-keV Ar ions might cause damage to the sp2 hybridization in DLC.