Improved memory performance of ALD grown HfO2 films by nitrogen doping
- Resource Type
- Article
- Authors
- Aziz, Jamal; Khan, Muhammad Farooq; Neumaier, Daniel; Ahmad, Muneeb; Kim, Honggyun; Rehman, Shania; Elahi, Ehsan; Chavan, Vijay D.; Ghafoor, Faisal; Kadam, Kalyani D.; Patil, Harshada; Ouladsmane, Mohamed
- Source
- In Materials Science & Engineering B November 2023 297
- Subject
- Language
- ISSN
- 0921-5107