Ultra-high density MEMS probe memory device
- Resource Type
- Article
- Authors
- Heck, John; Adams, Donald; Belov, Nickolai; Chou, Tsung-Kuan A.; Kim, Byong; Kornelsen, Kevin; Ma, Qing; Rao, Valluri; Severi, Simone; Spicer, Dean; Tchelepi, Ghassan; Witvrouw, Ann
- Source
- In Microelectronic Engineering 2010 87(5):1198-1203
- Subject
- Language
- ISSN
- 0167-9317