Vacancy-type defects in TiN/ZrO2/TiN capacitors probed by monoenergetic positron beams
- Resource Type
- Article
- Authors
- Uedono, Akira; Takahashi, Naomichi; Hasunuma, Ryu; Harashima, Yosuke; Shigeta, Yasuteru; Ni, Zeyuan; Matsui, Hidefumi; Notake, Akira; Kubo, Atsushi; Moriya, Tsuyoshi; Michishio, Koji; Oshima, Nagayasu; Ishibashi, Shoji
- Source
- In Thin Solid Films 30 November 2022 762
- Subject
- Language
- ISSN
- 0040-6090