Effect of capping layer on the ferroelectricity of hafnium oxide
- Resource Type
- Article
- Authors
- Chang, Jui-Hsuan; Zheng, Chen-Gui; Chen, Hsuan-Han; Chen, Pei-Tien; Liu, Cun-Bo; Huang, Kai-Yang; Hsu, Hsiao-Hsuan; Cheng, Chun-Hu; Chou, Wu-Ching; Han, Su-Ting
- Source
- In Thin Solid Films 1 July 2022 753
- Subject
- Language
- ISSN
- 0040-6090