Development of high performance piezoelectric d 33 mode MEMS vibration energy harvester based on PMN-PT single crystal thick film.
- Resource Type
- Article
- Authors
- Tang, Gang; Yang, Bin; Liu, Jing-quan; Xu, Bin; Zhu, Hong-ying; Yang, Chun-sheng
- Source
- Sensors & Actuators A: Physical. Jan2014, Vol. 205, p150-155. 6p.
- Subject
- *PIEZOELECTRIC devices
*MICROELECTROMECHANICAL systems
*VIBRATION (Mechanics)
*SINGLE crystals
*ENERGY harvesting
*FABRICATION (Manufacturing)
- Language
- ISSN
- 0924-4247
Highlights: [•] A design scheme of high performance MEMS vibration energy harvester based on PMN-PT single crystal thick film is presented. [•] The hybrid processes composed of wafer bonding and mechanical lapping for thinning is successfully developed to prepare the PMN-PT thick film. [•] The output power density of the fabricated device is calculated as 17,181.8μWcm−3, which is superior to the devices fabricated by other technologies in the reported literature. [•] It demonstrated a new way for the preparation of high performance piezoelectric MEMS energy harvester. [ABSTRACT FROM AUTHOR]