Etching spin-on trilayer masks.
- Resource Type
- Article
- Authors
- Abdallah, David J.; Miyazaki, Shinji; Hishida, Aritaka; Timko, Allen; McKenzie, Douglas; Rahman, Dalil; Kim, WooKyu; Pylneva, Lyudmila; Wu, Hengpeng; Zhang, Ruzhi; Lu, Ping-Hung; Neisser, Mark; Dammel, Ralph
- Source
- Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69230U-69230U-8, 8p
- Subject
- Language
- ISSN
- 0277786X