Improvement of CD variation control for attenuated phase-shift mask.
- Resource Type
- Article
- Authors
- Takagi, Mikio; Mizoguchi, Takashi; Kojima, Yosuke; Saga, Tadashi; Haraguchi, Takashi; Fukushima, Yuichi; Tanaka, Tsuyoshi; Okuda, Yoshimitsu; Inazuki, Yukio; Yoshikawa, Hiroki; Okazaki, Satoshi
- Source
- Proceedings of SPIE; Nov2007 Part 2, Issue 1, p66070B-66070B-8, 8p
- Subject
- Language
- ISSN
- 0277786X