Effect of Doping on Structure and Dielectric Property of SiCOH Films Prepared by Decamethylcyclopentasiloxane.
- Resource Type
- Article
- Source
- Journal of The Electrochemical Society; Mar2007, Vol. 154 Issue 3, pG63-G68, 6p, 2 Charts, 10 Graphs
- Subject
- Language
- ISSN
- 00134651