Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement.
- Resource Type
- Article
- Source
- Micromachines; Feb2024, Vol. 15 Issue 2, p224, 17p
- Subject
DISPLACEMENT (Mechanics) DETECTORS FIBER lasers OPTICAL fiber detectors ROUGH surfaces LASER interferometers - Language
- ISSN
- 2072666X