Investigation of Gallium Arsenide Deformation Anisotropy during Nanopolishing via Molecular Dynamics Simulation.
- Resource Type
- Article
- Source
- Micromachines; Jan2024, Vol. 15 Issue 1, p110, 16p
- Subject
GALLIUM arsenide MOLECULAR dynamics CRYSTAL orientation DEFORMATIONS (Mechanics) MAGNETIC anisotropy ANISOTROPY STRESS concentration - Language
- ISSN
- 2072666X