Interface Investigation on SiGe/Si Multilayer Structures: Influence of Different Epitaxial Process Conditions.
- Resource Type
- Article
- Authors
- Kong, Zhenzhen; Song, Yanpeng; Wang, Hailing; Liu, Xiaomeng; Wang, Xiangsheng; Liu, Jinbiao; Li, Ben; Su, Jiale; Tan, Xinguang; Luan, Qingjie; Lin, Hongxiao; Ren, Yuhui; Zhang, Yiwen; Liu, Jingxiong; Li, Junfeng; Du, Anyan; Radamson, Henry H.; Zhao, Chao; Ye, Tianchun; Wang, Guilei
- Source
- ACS Applied Materials & Interfaces; 12/6/2023, Vol. 15 Issue 48, p56567-56574, 8p
- Subject
- Language
- ISSN
- 19448244