Molecular Dynamics Simulation of Single-Crystal 4H-SiC Nano Scratching with Different Scratching Directions of the Tool.
- Resource Type
- Article
- Source
- Crystals (2073-4352); Jul2023, Vol. 13 Issue 7, p1044, 14p
- Subject
MOLECULAR dynamics NANOINDENTATION SURFACE morphology SINGLE crystals SEMICONDUCTOR devices PLASTICS SILICON carbide - Language
- ISSN
- 20734352