Influences of Nonaqueous Slurry Components on Polishing 4H-SiC Substrate with a Fixed Abrasive Pad.
- Resource Type
- Article
- Source
- Crystals (2073-4352); Jun2023, Vol. 13 Issue 6, p869, 11p
- Subject
TRITON X-100 ABRASIVES SLURRY SURFACE roughness ORGANIC acids - Language
- ISSN
- 20734352