Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications.
- Resource Type
- Article
- Source
- Micromachines; Aug2022, Vol. 13 Issue 8, p1287-1287, 13p
- Subject
ACTUATORS SILICON wafers FLEXIBLE structures LOW temperatures INHOMOGENEOUS materials SEMICONDUCTOR wafer bonding - Language
- ISSN
- 2072666X