Study of the Pattern Preparation and Performance of the Resistance Grid of Thin-Film Strain Sensors.
- Resource Type
- Article
- Source
- Micromachines; Jun2022, Vol. 13 Issue 6, p892-N.PAG, 17p
- Subject
STRAIN sensors ELECTRON beam lithography ATOMIC force microscopes MAGNETRONS SCANNING electron microscopes ION beams MAGNETRON sputtering - Language
- ISSN
- 2072666X