Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint.
- Resource Type
- Article
- Source
- Micromachines; Feb2021, Vol. 12 Issue 2, p121-121, 1p
- Subject
NANOIMPRINT lithography PHOTORESISTS NANOSTRUCTURES IMPRINTED polymers - Language
- ISSN
- 2072666X