Effects of N-2-content on formation behavior in AlN thin films studied by NEXAFS: Theory and experiment
- Resource Type
- Journal
- Authors
- Supruangnet, Ratchadaporn; Sailuam, Wutthigrai; Busayaporn, Wutthikrai; Wattanawikkam, Chakkaphan; Jiamprasertboon, Arreerat; Ruangvittayanon, Anuchit; Sangsai, Weerayoot; Pirasampansiri, Anan; Limpijumnong, Sukit; Yimnirun, Rattikorn; Bootchanont, Atipong
- Source
- JOURNAL OF ALLOYS AND COMPOUNDS; DEC 5 2020, 844 p156128 8p.
- Subject
- Language
- English
- ISSN
- 18734669