Nitride passivation of the interface between high-k dielectrics and SiGe
- Resource Type
- Journal
- Authors
- Sardashti, Kasra; Hu, Kai-Ting; Tang, Kechao; Madisetti, Shailesh; McIntyre, Paul; Oktyabrsky, Serge; Siddiqui, Shariq; Sahu, Bhagawan; Yoshida, Naomi; Kachian, Jessica; Dong, Lin; Fruhberger, Bernd; Kummel, Andrew C.
- Source
- APPLIED PHYSICS LETTERS; JAN 4 2016, 108 1, p011604 5p.
- Subject
- Language
- English
- ISSN
- 10773118