Improvement mechanism of resistance random access memory with supercritical CO2 fluid treatment
- Resource Type
- Journal
- Authors
- Chang, Kuan-Chang; Chen, Jung-Hui; Tsai, Tsung-Ming; Chang, Ting-Chang; Huang, Syuan-Yong; Zhang, Rui; Chen, Kai-Huang; Syu, Yong-En; Chang, Geng-Wei; Chu, Tian-Jian; Liu, Guan-Ru; Su, Yu-Ting; Chen, Min-Chen; Pan, Jhih-Hong; Liao, Kuo-Hsiao; Tai, Ya-Hsiang; Young, Tai-Fa; Sze, Simon M.; Ai, Chi-Fong; Wang, Min-Chuan; Huang, Jen-Wei
- Source
- JOURNAL OF SUPERCRITICAL FLUIDS; JAN 2014, 85 p183-p189, 7p.
- Subject
- Language
- English
- ISSN
- 18728162