microsystems & nanoengineering (10)
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ieee transactions on electron devices (8)
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ieee sensors journal (6)
nanomaterials (2079-4991) (6)
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materials (1996-1944) (4)
japanese journal of applied physics (3)
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2012 12th ieee international conference on nanotechnology (ieee-nano), nanotechnology (ieee-nano), 2012 12th ieee conference on (2)
2014 ieee 27th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2014 ieee 27th international conference on (2)
2019 ieee 14th nanotechnology materials and devices conference (nmdc), nanotechnology materials and devices conference (nmdc), 2019 ieee 14th (2)
2022 ieee sensors, sensors, 2022 ieee (2)
2023 22nd international conference on solid-state sensors, actuators and microsystems (transducers), solid-state sensors, actuators and microsystems (transducers), 2023 22nd international conference on (2)
2023 ieee 36th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2023 ieee 36th international conference on (2)
acs applied materials & interfaces (2)
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procedia engineering (2)
sensors (14248220) (2)
sensors and actuators: a. physical (2)
2011 11th ieee international conference on nanotechnology, nanotechnology (ieee-nano), 2011 11th ieee conference on (1)
2011 ieee international 3d systems integration conference (3dic), 2011 ieee international, 3d systems integration conference (3dic), 2011 ieee international (1)
2012 ieee international interconnect technology conference, interconnect technology conference (iitc), 2012 ieee international (1)
2013 ieee international interconnect technology conference - iitc, interconnect technology conference (iitc), 2013 ieee international (1)
2015 ieee international interconnect technology conference and 2015 ieee materials for advanced metallization conference (iitc/mam), interconnect technology conference and 2015 ieee materials for advanced metallization conference (iitc/mam), 2015 ieee international (1)
2017 ieee 30th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2017 ieee 30th international conference on (1)
2018 ieee 13th annual international conference on nano/micro engineered and molecular systems (nems), nano/micro engineered and molecular systems (nems), 2018 ieee 13th annual international conference on (1)
2019 ieee 32nd international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2019 ieee 32nd international conference on (1)
2020 ieee 33rd international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2020 ieee 33rd international conference on (1)
2021 ieee 34th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2021 ieee 34th international conference on (1)
2021 ieee sensors, sensors, 2021 ieee sensors (1)
2022 ieee 22nd international conference on nanotechnology (nano), nanotechnology (nano), 2022 ieee 22nd international conference on (1)
2022 ieee 35th international conference on micro electro mechanical systems conference (mems), micro electro mechanical systems conference (mems), 2022 ieee 35th international conference on (1)
2023 ieee international interconnect technology conference (iitc) and ieee materials for advanced metallization conference (mam)(iitc/mam), advanced metallization conference (mam)(iitc/mam), 2023 ieee international interconnect technology conference (iitc) and ieee materials for (1)
2023 ieee sensors, sensors, 2023 ieee (1)
2024 25th international conference on thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (eurosime), thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (eurosime), 2024 25th international conference on (1)
2024 ieee 37th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2024 ieee 37th international conference on (1)
applied thermal engineering (1)
beilstein journal of nanotechnology (1)