13th International Symposium on Semiconductor Wafer Bonding-Science, Technology and Applications as part of the 226th Meeting of the Electrochem Soc 13th International Symposium on Semiconductor Wafer Bonding-Science, Technology and Applications as part of the 226th Meeting of the Electrochem Soc, ECS, Oct 2014, Cancun, Mexico. pp.57-65, ⟨10.1149/06405.0057ecst⟩