2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), Jan 2023, Munich, Germany. pp.475-478, ⟨10.1109/MEMS49605.2023.10052621⟩
IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022) IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022), Jan 2022, Tokyo, Japan. pp.317-320, ⟨10.1109/MEMS51670.2022.9699466⟩ 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), Jan 2022, Tokyo, Japan. pp.317-320, ⟨10.1109/MEMS51670.2022.9699466⟩