proceedings of spie (79)
journal of micro-nanolithography mems and moems (6)
journal of micro/nanolithography, mems & moems (5)
microsystems & nanoengineering (4)
laser focus world (3)
micromachines (3)
2007 ieee/leos international conference on optical mems and nanophotonics, optical mems and nanophotonics, 2007 ieee/leos international conference on (2)
2013 international conference on optical mems & nanophotonics (omn) (2)
2013 international conference on optical mems and nanophotonics (omn), optical mems and nanophotonics (omn), 2013 international conference on (2)
handbook of silicon based mems materials and technologies (2)
nature communications (2)
procedia engineering (2)
16th international conference on optical mems and nanophotonics, optical mems and nanophotonics (omn), 2011 international conference on (1)
2008 2nd electronics system-integration technology conference, electronics system-integration technology conference, 2008. estc 2008. 2nd (1)
2008 ieee sensors, sensors, 2008 ieee (1)
2008 ieee/leos international conference on optical mems and nanophotonics, optical mems and nanophotonics, 2008 ieee/leos internationall conference on (1)
2008 international students and young scientists workshop - photonics and microsystems, photonics and microsystems, 2008 international students and young scientists workshop - (1)
2010 international conference on optical mems and nanophotonics, optical mems and nanophotonics (opt mems), 2010 international conference on (1)
2011 international students & young scientists workshop 'photonics & microsystems' (1)
2011 international students and young scientists workshop "photonics and microsystems", students and young scientists workshop, 2011 international (1)
2021 44th international spring seminar on electronics technology (isse), electronics technology (isse), 2021 44th international spring seminar on (1)
2021 international conference on numerical simulation of optoelectronic devices (nusod), numerical simulation of optoelectronic devices (nusod), 2021 international conference on (1)
applied optics (1)
human-computer interaction. ambient, ubiquitous & intelligent interaction (1)
journal of micro nanolithography mems and moems (1)
journal of micromechanics and microengineering (1)
microsystem technologies (1)
microsystem technologies: micro- and nanosystemsinformation storage and processing systems (1)
nonlinear dynamics (1)
nonlinear dynamics: an international journal of nonlinear dynamics and chaos in engineering systems (1)
physica status solidi (c) (1)
physical review fluids (1)
physics procedia (1)
sensors & actuators a: physical (1)
sensors & actuators: a. physical (1)
sensors and actuators: a. physical (1)
the journal of microlithography, microfabrication, and microsystems (1)