2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on. :804-807 Jan, 2016
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. :86-89 Mar, 2012
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on. :673-676 Jan, 2008
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on. :679-682 Jan, 2007