applied physics letters (17)
cirp annals (16)
journal of microelectromechanical systems (5)
mrs proceedings (5)
advanced materials (3)
energy harvesting and systems (3)
ieee transactions on ultrasonics, ferroelectrics, and frequency control (3)
integrated ferroelectrics (3)
journal of electroceramics (3)
optics express (3)
plos one (3)
procedia cirp (3)
spie proceedings (3)
17th ieee international conference on micro electro mechanical systems. maastricht mems 2004 technical digest (2)
2006 5th ieee conference on sensors (2)
applied sciences (2)
asian journal of innovation & policy (2)
design, synthesis, and applications (2)
journal of microelectromechanical systems, microelectromechanical systems, journal of, j. microelectromech. syst. (2)
mrs advances (2)
nanotechnology (2)
polymer engineering and science (2)
research (2)
robotics and computer-integrated manufacturing (2)
transactions of nonferrous metals society of china (2)
volume 15: advances in multidisciplinary engineering (2)
17th ieee international conference on micro electro mechanical systems. maastricht mems 2004 technical digest, micro electro mechanical systems, 2004. 17th ieee international conference on. (mems), micro electro mechanical systems (1)
18th ieee international conference on micro electro mechanical systems, 2005. mems 2005 (1)
18th ieee international conference on micro electro mechanical systems, 2005. mems 2005. (1)
18th ieee international conference on micro electro mechanical systems, 2005. mems 2005., micro electro mechanical systems, 2005. mems 2005. 18th ieee international conference on, micro electro mechanical systems (1)
2003 third ieee conference on nanotechnology, 2003. ieee-nano 2003 (1)
2003 third ieee conference on nanotechnology, 2003. ieee-nano 2003., nanotechnology, 2003. ieee-nano 2003. 2003 third ieee conference on, nanotechnology, ieee-nano 2003 (1)
2007 ieee international conference on automation science & engineering (1)
2007 ieee international conference on automation science and engineering (1)
2008 ieee 21st international conference on micro electro mechanical systems (1)
2009 ieee 22nd international conference on micro electro mechanical systems (1)
2011 ieee 24th international conference on micro electro mechanical systems (1)
2012 ieee international ultrasonics symposium (1)
2013 ieee sensors (1)
digest of papers microprocesses & nanotechnology'98 198 international microprocesses & nanotechnology conference (cat no98ex135) (1)
energy harvesting & systems (1)
international electron devices meeting 1998 technical digest (cat no98ch36217) (1)
international journal of precision engineering and manufacturing (1)
ite technical report (1)
journal of vacuum science & technology: part b-microelectronics & nanometer structures (1)
micromachines (1)
optical fiber communication conference & exhibit (1)
summaries of papers presented at the lasers & electro-optics. cleo '02. technical diges (1)
한국표면공학회 학술발표회 초록집 (1)
中国有色金属学报(英文版) (1)