Proceedings International Conference on MEMS, NANO and Smart Systems MEMS, NANO and smart systems MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on. :84-88 2003
2005 International Conference on MEMS,NANO and Smart Systems MEMS, NANO and Smart Systems MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on. :182-184 2005
2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on. :344-345 2004