microelectronic engineering (10)
proceedings of spie (9)
applied physics letters (8)
journal of vacuum science & technology b (7)
journal of vacuum science & technology: part b-microelectronics & nanometer structures (6)
journal of vacuum science & technology: part b-nanotechnology & microelectronics (4)
journal of applied physics (3)
2006 international interconnect technology conference (2)
2006 international interconnect technology conference, interconnect technology conference, 2006 international (2)
2011 ieee international interconnect technology conference, interconnect technology conference and 2011 materials for advanced metallization (iitc/mam), 2011 ieee international (2)
2011 ieee international soi conference (soi) (2)
ieee 2011 international soi conference, soi conference (soi), 2011 ieee international (2)
interconnect technology conference & 2011 materials for advanced metallization (iitc/mam), 2011 ieee international (2)
2009 ieee international interconnect technology conference (1)
2009 ieee international interconnect technology conference, interconnect technology conference, 2009. iitc 2009. ieee international (1)
2010 ieee international interconnect technology conference, interconnect technology conference (iitc), 2010 international (1)
2010 international electron devices meeting, electron devices meeting (iedm), 2010 ieee international (1)
2011 symposium on vlsi technology - digest of technical papers, vlsi technology (vlsit), 2011 symposium on (1)
2013 ieee international interconnect technology conference - iitc (1)
2013 ieee international interconnect technology conference - iitc, interconnect technology conference (iitc), 2013 ieee international (1)
2014 ieee international electron devices meeting, electron devices meeting (iedm), 2014 ieee international (1)
2015 china semiconductor technology international conference (1)
2015 china semiconductor technology international conference, semiconductor technology international conference (cstic), 2015 china (1)
2015 ieee international interconnect technology conference & 2015 ieee materials for advanced metallization conference (iitc/mam) (1)
2015 ieee international interconnect technology conference and 2015 ieee materials for advanced metallization conference (iitc/mam), interconnect technology conference and 2015 ieee materials for advanced metallization conference (iitc/mam), 2015 ieee international (1)
2016 ieee international electron devices meeting (iedm), electron devices meeting (iedm), 2016 ieee international (1)
2016 ieee symposium on vlsi technology, vlsi technology, 2016 ieee symposium on (1)
2022 ieee 34th international symposium on power semiconductor devices and ics (ispsd), power semiconductor devices and ics (ispsd), 2022 ieee 34th international symposium on (1)
2023 ieee international interconnect technology conference (iitc) and ieee materials for advanced metallization conference (mam)(iitc/mam), advanced metallization conference (mam)(iitc/mam), 2023 ieee international interconnect technology conference (iitc) and ieee materials for (1)
advanced semiconductor manufacturing conference & workshop, 2003 ieeei/semi (1)
advanced semiconductor manufacturing conference and workshop, 2003 ieeei/semi, advanced semiconductor manufacturing (1)
ecs meeting abstracts (1)
interconnect technology conference (iitc), 2010 international (1)
journal of vacuum science & technology a (1)
journal of vacuum science & technology b, nanotechnology and microelectronics: materials, processing, measurement, and phenomena (1)
journal of vacuum science & technology: part a-vacuums, surfaces & films (1)
proceedings of technical program of 2012 vlsi technology, system & application (1)
proceedings of technical program of 2012 vlsi technology, system and application, vlsi technology, systems, and applications (vlsi-tsa), 2012 international symposium on (1)
proceedings of the ieee 2004 international interconnect technology conference (ieee cat. no.04th8729), interconnect technology conference, 2004. proceedings of the ieee 2004 international, interconnect technology (1)