ieee transactions on semiconductor manufacturing (19)
solid state technology (5)
2006 ieee conference on emerging technologies and factory automation, emerging technologies and factory automation, 2006. etfa '06. ieee conference on (3)
ieee transactions on components, packaging & manufacturing technology, part c (3)
information sciences (3)
international journal of control (3)
2008 ieee international conference on automation science and engineering, automation science and engineering, 2008. case 2008. ieee international conference on (2)
2012 semi advanced semiconductor manufacturing conference (2)
2012 semi advanced semiconductor manufacturing conference, advanced semiconductor manufacturing conference (asmc), 2012 23rd annual semi (2)
2015 26th annual semi advanced semiconductor manufacturing conference (asmc) (2)
2015 26th annual semi advanced semiconductor manufacturing conference (asmc), advanced semiconductor manufacturing conference (asmc), 2015 26th annual semi (2)
2016 27th annual semi advanced semiconductor manufacturing conference (asmc) (2)
2016 27th annual semi advanced semiconductor manufacturing conference (asmc), advanced semiconductor manufacturing conference (asmc), 2016 27th annual semi (2)
computers in industry (2)
ieee transactions on smart grid (2)
journal of vacuum science & technology: part a-vacuums, surfaces & films (2)
photovoltaics international (2)
processes (2)
sensors (14248220) (2)
2007 ieee international symposium on precision clock synchronization for measurement, control and communication, precision clock synchronization for measurement, control and communication, 2007. ispcs 2007. ieee international symposium on (1)
2008 american control conference, american control conference, 2008 (1)
2008 ieee international symposium on precision clock synchronization for measurement, control and communication, precision clock synchronization for measurement, control and communication, 2008. ispcs 2008. ieee international symposium on (1)
2010 ieee international symposium on precision clock synchronization for measurement, control and communication, precision clock synchronization for measurement control and communication (ispcs), 2010 international ieee symposium on (1)
2010 ieee/semi advanced semiconductor manufacturing conference (asmc), advanced semiconductor manufacturing conference (asmc), 2010 ieee/semi (1)
2011 ieee international symposium on precision clock synchronization for measurement, control and communication, precision clock synchronization for measurement control and communication (ispcs), 2011 international ieee symposium on (1)
2011 ieee power and energy society general meeting, power and energy society general meeting, 2011 ieee (1)
2014 44th european solid state device research conference (essderc) (1)
2014 44th european solid state device research conference (essderc), solid state device research conference (essderc), 2014 44th european (1)
2018 29th annual semi advanced semiconductor manufacturing conference (asmc), semi advanced semiconductor manufacturing conference (asmc), 2018 29th annual (1)
2018 annual american control conference (acc), american control conference (acc), 2018 annual (1)
2019 american control conference (acc), control conference (acc), 2019 american (1)
2019 ieee 15th international conference on automation science and engineering (case), automation science and engineering (case), 2019 ieee 15th international conference on (1)
2019 ieee symposium on security and privacy (sp), security and privacy (sp), 2019 ieee symposium on (1)
2020 31st annual semi advanced semiconductor manufacturing conference (asmc), semi advanced semiconductor manufacturing conference (asmc), 2020 31st annual (1)
2021 american control conference (acc), american control conference (acc), 2021 (1)
2021 ieee international roadmap for devices and systems outbriefs, roadmap for devices and systems outbriefs, 2021 ieee international, irds (1)
2023 ieee 19th international conference on automation science and engineering (case), automation science and engineering (case), 2023 ieee 19th international conference on (1)
25th annual semi advanced semiconductor manufacturing conference (asmc 2014) (1)
25th annual semi advanced semiconductor manufacturing conference (asmc 2014), advanced semiconductor manufacturing conference (asmc), 2014 25th annual semi (1)
asmc 2013 semi advanced semiconductor manufacturing conference, advanced semiconductor manufacturing conference (asmc), 2013 24th annual semi (1)
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ieee robotics & automation magazine (1)
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