Journal of Vacuum Science & Technology A Journal of Vacuum Science & Technology A, 2019, 37 (2), pp.021512. ⟨10.1116/1.5082185⟩ Journal of Vacuum Science and Technology A Journal of Vacuum Science and Technology A, American Vacuum Society, 2019, 37 (2), pp.021512. ⟨10.1116/1.5082185⟩