2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Micro Electro Mechanical Systems Conference (MEMS), 2022 IEEE 35th International Conference on. :317-320 Jan, 2022
IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022) IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS 2022), Jan 2022, Tokyo, Japan. pp.317-320, ⟨10.1109/MEMS51670.2022.9699466⟩ 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), Jan 2022, Tokyo, Japan. pp.317-320, ⟨10.1109/MEMS51670.2022.9699466⟩