2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. :800-803 Jan, 2012
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on. :316-319 Jan, 2009
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on. :208-211 Jan, 2008