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1 . Academic Journal
Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors.
- 저자
- by Lebreton, Allan; Besland, Marie-Paule; Jouan, Pierre-Yves; Signe, Tatiana; Mannequin, Cédric, et al.
- 소스
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Mar2024, Vol. 42 Issue 2, p1-13, 13p