mrs online proceedings library (14)
aip conference proceedings (10)
ecs transactions (6)
thin solid films (6)
ieee transactions on semiconductor manufacturing (3)
nuclear inst. and methods in physics research, b (3)
radiation effects (3)
radiation effects and defects in solids (3)
surface & coatings technology (3)
journal of applied physics (2)
review of scientific instruments (2)
2007 15th international conference on advanced thermal processing of semiconductors, advanced thermal processing of semiconductors, 2007. rtp 2007. 15th international conference on (1)
2009 international workshop on junction technology, junction technology, 2009. iwjt 2009. international workshop on (1)
2012 12th international workshop on junction technology (1)
2012 12th international workshop on junction technology, junction technology (iwjt), 2012 12th international workshop on (1)
2012 international silicon-germanium technology & device meeting (istdm) (1)
2012 international silicon-germanium technology and device meeting (istdm), silicon-germanium technology and device meeting (istdm), 2012 international (1)
2018 22nd international conference on ion implantation technology (iit), ion implantation technology (iit), 2018 22nd international conference on (1)
acta metallurgica et materialia (1)
diffusion and defect data part b: solid state phenomena (1)
ieee electron device letters (1)
journal of physics: condensed matter (1)
journal of vacuum science & technology: part a-vacuums, surfaces & films (1)
journal of vacuum science & technology: part b-microelectronics & nanometer structures (1)
materials science & engineering a (1)
materials science & engineering b (1)
materials science & engineering: b (1)
materials science & technology (1)
materials science forum (1)
nuclear instruments & methods in physics research section b (1)
nuclear instruments and methods in physics research section b (1)
proceedings of spie (1)
scripta metallurgica et materiala (1)
tribology international (1)
vacuum (1)