microsystem technologies (8)
japanese journal of applied physics (7)
thin solid films (5)
microsystem technologies: micro- and nanosystemsinformation storage and processing systems (4)
biomedical microdevices (3)
ceramics international (3)
journal of materials science (3)
journal of microelectromechanical systems (3)
mhs2013 (3)
mhs2013, micro-nanomechatronics and human science (mhs), 2013 international symposium on (3)
microsystem technologies-micro-and nanosystems-information storage and processing systems (3)
scientific reports (3)
2015 28th ieee international conference on micro electro mechanical systems (mems) (2)
2015 28th ieee international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2015 28th ieee international conference on (2)
energy harvesting and systems (2)
sensors & actuators a: physical (2)
2009 international symposium on micro-nanomechatronics and human science, micro-nanomechatronics and human science, 2009. mhs 2009. international symposium on (1)
2010 international symposium on micro-nanomechatronics and human science, micro-nanomechatronics and human science (mhs), 2010 international symposium on (1)
2011 16th international solid-state sensors, actuators and microsystems conference, solid-state sensors, actuators and microsystems conference (transducers), 2011 16th international (1)
2011 international symposium on micro-nanomechatronics and human science, micro-nanomechatronics and human science (mhs), 2011 international symposium on (1)
2012 12th ieee international conference on nanotechnology (ieee-nano) (1)
2012 12th ieee international conference on nanotechnology (ieee-nano), nanotechnology (ieee-nano), 2012 12th ieee conference on (1)
2014 international symposium on micro-nanomechatronics & human science (mhs) (1)
2014 international symposium on micro-nanomechatronics and human science (mhs), micro-nanomechatronics and human science (mhs), 2014 international symposium on (1)
2023 22nd international conference on solid-state sensors, actuators and microsystems (transducers), solid-state sensors, actuators and microsystems (transducers), 2023 22nd international conference on (1)
biomedical microdevices: biomems and biomedical nanotechnology (1)
ieej transactions on electrical & electronic engineering (1)
ieej transactions on electrical and electronic engineering (1)
journal of materials science: full set - includes `journal of materials science letters' (1)
sensors & actuators b: chemical (1)
sensors and actuators a-physical (1)
sensors and actuators b-chemical (1)
sensors and actuators: a. physical (1)