Proceedings of Ninth International Workshop on Micro Electromechanical Systems Micro electro mechanical systems Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on. :473-478 1996
IEEE Conference Record - Abstracts. 1991 IEEE International Conference on Plasma Science Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on. :183-184 1991
IEEE Conference Record - Abstracts. 1991 IEEE International Conference on Plasma Science Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on. :135-135 1991
IEEE Conference Record - Abstracts. 1991 IEEE International Conference on Plasma Science Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on. :175-175 1991