2011 IEEE 24th International Conference on Micro Electro Mechanical Systems Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on. :300-303 Jan, 2011
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on. :344-347 Jan, 2010