proceedings of spie (36)
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2016 international conference on optical mems and nanophotonics (omn), optical mems and nanophotonics (omn), 2016 international conference on (3)
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2008 ieee/leos international conference on optical mems and nanophotonics, optical mems and nanophotonics, 2008 ieee/leos internationall conference on (1)
2009 ieee/leos international conference on optical mems and nanophotonics, optical mems and nanophotonics, 2009 ieee/leos international conference on (1)
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2012 ieee 25th international conference on micro electro mechanical systems (mems) (1)
2012 ieee 25th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2012 ieee 25th international conference on (1)
2016 ieee 29th international conference on micro electro mechanical systems (mems) (1)
2016 ieee 29th international conference on micro electro mechanical systems (mems), micro electro mechanical systems (mems), 2016 ieee 29th international conference on (1)
2017 international conference on optical mems and nanophotonics (omn), optical mems and nanophotonics (omn), 2017 international conference on (1)
2019 international conference on optical mems and nanophotonics (omn), optical mems and nanophotonics (omn), 2019 international conference on (1)
2021 21st international conference on solid-state sensors, actuators and microsystems (transducers), ssolid-state sensors, actuators and microsystems (transducers), 2021 21st international conference on (1)
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